Lithography, Semiconductor Fabrications, and Electronic Materials

Title Reference Number 3D Lithographic Micro-Structure Fabrication Technique STC-PS-0665 Additional Growth Ideas and Applications of GaN Nanowires STC-PS-0941 Chemical Vapor Deposition of Metal Sulfide Films From Metal Thiocarboxylate Complexes With Monodentate or Multidentate Ligands STC-PS-0418 Complex Dielectrics by Design STC-PS-0949 Cubic Phase, Nitrogen-based Compound Semiconductor Films Epitaxially Grown on a Grooved Silicon Substrate STC-PS-0942 Defect Reduction by Annealing Nanoscale Semiconductor Islands During the Initial Stage of Coalescence STC-PS-0960 Diffracted Light from Latent Images in Photoresist for Exposure Control STC-PS-0309 Epitaxial Growth of In-Plane Nanowire Devices STC-PS-0867 Equipment and Procedure for a Miniature Linear Ion Trap Allowing Spatial Focusing and Resolving of Ions According to Their Mass/Charge Value STC-PS-0762 Fabrication of Enclosed Nanochannels Using Silica Nanoparticles STC-PS-0710B Firebird: A Rad-hard Dual Data Rate Flip-Flop STC-PS-0956 Firebird: A SEU-hardened Dual Data Rate Flip-Flop STC-PS-0966 GaN-Based Nanowire HEMTs STC-PS-0835 Generalized Tilted Transverse Bragg Waveguide STC-PS-0684 Independent Control of Pitch and Absolute Size of Template Windows to Selectively Grow High-Quality Germanium on Silicon STC-PS-0884 Interferometric Lithography Patterns with Circular Symmetry STC-PS-0759 Interferometric Lithography Tool for the Manufacture for Nanoscale Patterns STC-PS-0710 Ion-Specific Control of the Transport of Fluid and Current in Fluidic Nanochannels STC-PS-0773 Large-Area Interferometric Lithography STC-PS-0760 Low Dielectric Constant Material for Electronics STC-PS-0390 Metamorphic Buffer Semiconductor Lasers STC-PS-0655 Method & Apparatus for Improving Pattern Fidelity in Diffraction-Limited Imaging STC-PS-0515 Method and Apparatus for Alignment and Overlay of Submicron Lithographic Features STC-PS-0295 Method and Apparatus for Alignment of Submicron Lithographic Features STC-PS-0297 Method and Apparatus for Extending Spatial Frequencies in Photolithography Images STC-PS-0482 Method and Apparatus for Real-Time Speckle Interferometry for Strain or Displacement of an Object Surface STC-PS-0367 Method for Fine-Line Interferometric Lithography STC-PS-0346 Method for Manufacture of Quantum Sized Periodic Structures in Si Materials STC-PS-0322 Method of Depositing Metal Sulfide Films From Metal Thiocarboxylate Complexes with Multidentate Ligands STC-PS-0419 Method of Making Dense, Conformal, Ultra-Thin Cap Layers of Nanoporous Low-k ILD by Plasma-Assisted Atomic Layer Deposition STC-PS-0745 Methods and Apparatus for Integrating Optical and Interferometric Lithography to Produce Complex Patterns STC-PS-0460 Methods and Apparatuses for Lithography of Sparse Arrays of Sub-Micrometer Features STC-PS-0393 Microelectromechanical Dual-mass Resonator Structure STC-PS-0552 Nanofluidics for Bioseparation and Analysis STC-PS-0675 Nanoheteroepitaxy of Ge on Si: A Foundation for III-V and II-VI Integration STC-PS-0687 Nanostructural Lithography Tailoring of Mesophases in Thin Silica Films STC-PS-0525 Novel Non-Carbonaceous Supports for PEMFC Electrocatalysts STC-PS-0764 Optically Pumped Reconfigurable Antenna Systems (OPRAs) STC-PS-0944 Porous Composites as Low Dielectric Constant Material for Electronics Applications STC-PS-0388 Porous Dielectric Material with Improved Pore Surface Properties For Electronics Applications STC-PS-0391 Quantum Dots Nucleation Layer of Lattice Mismatched Epitaxy STC-PS-0698 Rapid Prototyping of Patterned Organic/Inorganic Functional Nanostructures STC-PS-0560 Self-Aligned Spatial Frequency Doubling STC-PS-0789 Semiconductor Conductive Layers STC-PS-0670 Sequential Circuit Design for Radiation Hardened Multiple Voltage Integrated Circuits STC-PS-0711 Simple CD Measurement of Periodic Structures on Photomasks STC-PS-0291 Single Event Upset (SEU) Hardened Clock Driver STC-PS-0897 Slurry-Free Chemical Mechanical Planarization (CMP) of Engineered Germanium-on-Silicon Wafers STC-PS-0925 Stimuli-Responsive Hybrid Materials Containing Molecular Actuators and Their Applications STC-PS-0554 Structured Illumination for the Extension of Imaging Interferometric Microscopy STC-PS-0846 Surface Corrugation on Internal Reflection Infrared Waveguide for Enhanced Detection Sensitivity and Selectivity STC-PS-0586 Synthesis of Attrition Resistant Heterogenous Catalysts Using Spray-Dried Mesoporous Silica STC-PS-0529 Threading-dislocation-free Nanoheteroepitaxy of Ge on Si Using Self-directed "Touch-Down" of Ge Through a Thin Si0(2) Layer STC-PS-0650 Ultra-Thin High-Quality Germanium on Silicon by Low-Temperature Epitaxy and Post-Growth Annealing STC-PS-0780

There are 54 technologies in this category.